Multi-turn time of flight Secondary Neutrals Mass Spectrometer (MULTUM-SNMS)

Sub-micron scale fine structures such as minerals in a polymict breccia are irradiated with a focused ion beam. Secondary neutrals sputtered by an ion beam are post-ionized with a high power laser and ions are analyzed by multi-turn time-of-flight mass spectrometer. We have been developing this instrument to accomplish high sensitivity and high spatial resolution over SIMS (Secondary Ionization Mass Spectrometer).

Detailed information

Scanning Electron Microscope (SEM) /
Energy Dispersive X-ray Spectrometer (EDS)

Detects secondary electrons and backscattered electrons emitted by electron beam irradiation, and obtains an uneven image and composition image of the sample surface. At the same time, elemental analysis can be conducted by measuring the emitted characteristic X-rays.

• SEM : JSM-6010A (JEOL)
• EDS : NORAN™ System 7 (Thermo Scientific)